Spectroscopy

Ellipsometer - UVISEL 2

Allgemeine Informationen

Untersuchungsgebiete

Spectroscopy
Techniken

Ellipsometry
Hersteller

Horiba
Herstellungsjahr

2025
Gemessene Gr??e

Through measuring the changes in polarisation the ellipsometer can derive film thickness, optical properties (refractive index, extinction coefficient ect.) and material properties (composition, microstructure ect.) of the sample.
Hauptanwendung

Phase modulated ellipsometry (wavelength range: 190 - 2100 nm) with a spatial resolution down to 35 ?m
In-situ, real-time kompatibel

Ja
Hochdurchsatzanalysen

Ja
Korrelierter Arbeitsablauf verfügbar

Ja
Einrichtung

Der Zugang zu diesem Ger?t ist über die MAPEX Core Facility for Materials Analytics m?glich.

Technische Aspkete

Ellipsometer with a motorized tip-and tilt sample stage and the motorized goniometer that includes the excitation source (short-arc XBO lamp) and the optics for the light detection. The system has three monochromators that enable the wide accessible wavelength range from 190 – 2100 nm (≈ 6.5 – 0.6 eV). This ellipsometer also features a mapping function with a spatial resolution down to 35 ?m. The program of the Ellipsometer includes an in depth modelling and fitting system that can, for example, analyse and calculate thin film thicknesses from a few angstroms to several microns, for single layer or complex multilayer stacks. Other features include the calculation of the frequency-dependence of the real and imaginary part of the complex dielectric function.
In-situ-M?glichkeiten

Room temperature and higher temperatures (heating stage), different angles, liquid and solid samples.
Korrelierter Arbeitsablauf

Photoluminessence and Photoluminessence Excitation measurements, Electron microscopy, X-Ray Defraction, various surface analysis methods, etc.
Weitere Untersuchungsm?glichkeiten

Depending on the outcome of the measurements with the Ellipsometer, there is always the possibility to transition towards other spectroscopic equipment of the RG Callsen based on a collaboration.

Aktualisiert von: MAPEX