Spectroscopy

Ellipsometer - UVISEL 2

General information

Investigation area

Spectroscopy
Techniques

Ellipsometry
Manufacturer

Horiba
Fabrication year

2025
Measured quantity

Through measuring the changes in polarisation the ellipsometer can derive film thickness, optical properties (refractive index, extinction coefficient ect.) and material properties (composition, microstructure ect.) of the sample.
Main application

Phase modulated ellipsometry (wavelength range: 190 - 2100 nm) with a spatial resolution down to 35 ?m
In-situ, real-time compatible

Yes
High-throughtput analysis

Yes
Correlated workflow available

Yes
Facility

Access to this instrument is possible via the MAPEX Core Facility for Materials Analytics

Technical aspects

Ellipsometer with a motorized tip-and tilt sample stage and the motorized goniometer that includes the excitation source (short-arc XBO lamp) and the optics for the light detection. The system has three monochromators that enable the wide accessible wavelength range from 190 – 2100 nm (≈ 6.5 – 0.6 eV). This ellipsometer also features a mapping function with a spatial resolution down to 35 ?m. The program of the Ellipsometer includes an in depth modelling and fitting system that can, for example, analyse and calculate thin film thicknesses from a few angstroms to several microns, for single layer or complex multilayer stacks. Other features include the calculation of the frequency-dependence of the real and imaginary part of the complex dielectric function.
In-situ capabilities

Room temperature and higher temperatures (heating stage), different angles, liquid and solid samples.
Correlated workflow

Photoluminessence and Photoluminessence Excitation measurements, Electron microscopy, X-Ray Defraction, various surface analysis methods, etc.
Additional measurement possibilities

Depending on the outcome of the measurements with the Ellipsometer, there is always the possibility to transition towards other spectroscopic equipment of the RG Callsen based on a collaboration.

Updated by: MAPEX