The repair of the pictured UVISEL 2 ellipsometer from Horiba was funded.

Feature: This ellipsometer is a highly automated, spectroscopic ellipsometer for the wavelength range of 190 - 2100 nm.

Measured quantity: The ellipsometer is a micro-spot ellipsometer, which can achieve very small spot sizes (eg 35 ?m x 85 ?m), making it possible to examine even smaller structures. In addition to the high-precision measurement of layer thicknesses even below a monolayer, this ellipsometer enables comprehensive experimental access to a large number of optical constants.

In addition to adjustable spot sizes, a wide-angle range of 35° - 90° can also be measured with this ellipsometer. In addition, the system is equipped with a “vision” system, which not only allows the micro-spot to be positioned precisely on the sample, but also enables autofocus, among other things.

Principle: The ellipsometer is based on the “photo-elastic modulator (PEM)” measuring principle, which allows an extremely low-noise measuring signal to be recorded.

Evaluation software: The measurement data is evaluated using the DeltaPsi2 software from Horiba

Applied by: 

Prof. Gordon Callsen

(Semiconductor Optics, Faculty 1)